Functionalised SU-8 patterned with X-ray lithography
(translated: Proceedings of the 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN49)
Year: | 2005 |
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(translated: Proceedings of the 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, EIPBN49)
Year: | 2005 |
---|
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