About

Log in?

DTU users get better search results with free access to licensed content and discounts on order fees.

Anyone can log in and get personalized features such as favorites, tags and feeds.

Log in as DTU user Log in as non-DTU user No thanks

DTU Findit

Fast silicon etching by plasma-sheath-lens focused negative ions

(translated: Book of Abstracts)

Year: 2009
Pages: 14-16

DTU users get better search results with free access to licensed content and discounts on order fees.

Log in as DTU user

Access